$35 Million Investment Will Expand Axcelis’ Manufacturing Capacity and Enable the Company to Better Serve Customers

BEVERLY, Mass., Oct. 20, 2026 /PRNewswire/ — Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor industry, today announced that it will officially break ground on its new ion implantation equipment manufacturing facility in Pyeongtaek, Gyeonggi Province, Korea. This $35 million investment reflects Axcelis’ continued commitment to strengthening its high-volume manufacturing infrastructure and expanding its capacity to serve customers around the world.

The Pyeongtaek site will expand Axcelis’ current manufacturing operations in Korea, the Axcelis Asia Operations Center. The new facility will encompass approximately 200,000 square feet of total gross floor area. The manufacturing center’s design will provide a lean production environment that integrates learnings from the Company’s nearly 50 years of semiconductor capital equipment experience. The Pyeongtaek facility will include warehousing, cleanrooms, and a training center to enable fast and flexible responses to customers’ needs. Production at the new manufacturing facility is scheduled to commence in the second half of 2028.

President and CEO Russell Low commented, “We are proud to celebrate this pivotal moment for Axcelis and the next chapter of our growth in Korea. As the global economy enters the AI era, leadership in advanced semiconductors will be a cornerstone of technological progress and economic growth. This new facility will expand our ability to serve customers while building on the ingenuity of our people, whose work helps enable breakthrough technologies and a more sustainable, prosperous future for all.”

Governor of Gyeonggi Province Choo Mi Ae stated, “I would like to extend my sincere congratulations on the groundbreaking of Axcelis Korea’s Pyeongtaek facility. Axcelis’ investment in advanced semiconductor process equipment represents a significant milestone in strengthening the position of Gyeonggi Province and Pyeongtaek City as global hubs for the semiconductor industry. In particular, we expect this project to contribute greatly not only to the creation of high-quality jobs and the revitalization of the local economy, but also to enhance the competitiveness of the world’s leading semiconductor ecosystem. Gyeonggi Province will continue to foster a business-friendly environment and provide efficient administrative support to help Axcelis achieve sustainable growth and long-term success in Korea. Once again, congratulations on this groundbreaking ceremony. I wish Axcelis every success in its business expansion and continued prosperity in the years ahead.”

About Axcelis

Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for nearly 50 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. Learn more about Axcelis at www.axcelis.com.

Safe Harbor Statement:

Statements made in this press release that are not of known historical fact are forward-looking statements and are subject to the safe harbor provisions created by the Private Securities Litigation Reform Act of 1995. These statements are based on management’s current expectations and should be viewed with caution. They are subject to various risks and uncertainties that could cause actual results to differ materially from those in the forward-looking statements, including the risks and uncertainties that are described in the documents filed or furnished by us with the Securities and Exchange Commission (“SEC”), including specifically the risk factors described in our most recent Annual Report on Form 10-K and other subsequent filings with the SEC. The Company undertakes no obligation to update the information or statements made in this press release.

CONTACTS:

Investor Relations Contact:
David Ryzhik
Senior Vice President and Interim CFO
Telephone: (978) 787-2352
Email: David.Ryzhik@axcelis.com

Press/Media Relations Contacts: 
Maureen Hart
Senior Director, Corporate & Marketing Communications
Telephone: (978) 787-4266
Email: Maureen.Hart@axcelis.com

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SOURCE Axcelis Technologies, Inc.